| 000 | 00524nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 220516s9999 xx 000 0 und d | ||
| 020 | _a012014574X | ||
| 041 | _aeng | ||
| 082 |
_a537.56 _bSEP/A |
||
| 100 | _aSeptier ,A | ||
| 245 | 0 |
_aApplied Charged Particle Optics _c / by A. Septier |
|
| 260 |
_aNew York : _bAcademic Press , _c1980. |
||
| 300 | _axvii,392p. | ||
| 650 | _aElectron Beam Lithography | ||
| 650 | _aElectron Spectroscopy | ||
| 650 | _aImplantation Technology | ||
| 650 | _aPhysics | ||
| 942 | _cBK | ||
| 999 |
_c8708 _d8708 |
||