TY  - BOOK
AU  - Huff, Howard R.
TI  - Into the nano era : Moore's law beyond planar silicon CMOS
SN  - 9783540745587
U1  - 621.3815 
PY  - 2009///
CY  - Heidelberg
PB  - Springer
KW  - Semiconductors--Materials
KW  -  Silicon--Electric properties
ER  -